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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Accelerating litho technology development for advanced design node flash memory FEOL by next-generation wafer inspection and SEM review platforms

Lee, Byoung Ho, Ahn, Jeongho, Ihm, Dongchul, Chin, Soobok, Lee, Dong-Ryul, Choi, Seongchae, Lee, Junbum, Kang, Ho-Kyu, Sivaraman, Gangadharan, Yamamoto, Tetsuya, Lakhawat, Rahul, Sanapala, Ravikumar,

Year:

2012

Language:

english

File:

PDF, 2.66 MB

english, 2012

2

Electron spin resonance study of Mo(V) ion species incorporated into aluminosilicate nanospheres with solid core/mesoporous shell structure

Gernho Back, Hyeyoung Lee, Minsik Kim, Jong-Sung Yu, Soobok Jeong, Young Bae Chae

Journal:

Journal of Materials Science

Year:

2009

Language:

english

File:

PDF, 380 KB

english, 2009

3

Low-temperature fabrication (

Kim, DooHyun, Lee, DongHyeok, Yoon, SooBok, Jang, JinNyoung, Hong, MunPyo

Journal:

Current Applied Physics

Year:

2012

Language:

english

File:

PDF, 560 KB

english, 2012

4

Concentration polarization, membrane fouling and cleaning in ultrafiltration of soluble oil

Lee, Soobok, Aurelle, Yves, Roques, Henry

Journal:

Journal of Membrane Science

Year:

1984

Language:

english

File:

PDF, 603 KB

english, 1984

5

Mixed-matrix membrane prepared from crosslinked PVA with NaA zeolite for pervaporative separation of water–butanol mixtures

Oh, Duckkyu, Lee, Soobok, Lee, Yongtaek

Journal:

DESALINATION AND WATER TREATMENT

Year:

2013

Language:

english

File:

PDF, 604 KB

english, 2013

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Metrology, Inspection, and Process Control for Microlithography XXVII - Optical analysis on the wafer defect inspection for yield enhancement

Ahn, Jeongho, Lee, Byoungho, Lee, Dong-Ryul, Seong, Shijin, Kim, Hyungseop, Choi, Seongchae, Sunwoo, Heewon, Lee, Junbum, Ihm, Dongchul, Chin, Soobok, Kang, Ho-Kyu, Starikov, Alexander, Cain, Jason P.

Year:

2013

Language:

english

File:

PDF, 674 KB

english, 2013

7

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Highly effective and accurate weak point monitoring method for advanced design rule (1x nm) devices

Cain, Jason P., Sanchez, Martha I., Ahn, Jeongho, Seong, ShiJin, Yoon, Minjung, Park, Il-Suk, Kim, HyungSeop, Ihm, Dongchul, Chin, Soobok, Sivaraman, Gangadharan, Li, Mingwei, Babulnath, Raghav, Lee,

Year:

2014

Language:

english

File:

PDF, 404 KB

english, 2014

8

[WORLD SCIENTIFIC Proceedings of the 4th International Conference - Nanning, Guangxi, China (18 – 21 February 2004)] Frontiers on Separation Science and Technology - PERMEATION, SORPTION AND DIFFUSION BEHAVIORS OF OLEFINS AND NITROGEN THROUGH PDMS DENSE MEMBRANE

KIM, JEONGHOON, SHIN, HYOJIN, CHOI, SEONGHAK, PARK, INJUN, LEE, SOOBOK

Language:

english

File:

PDF, 236 KB

english

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Defect distribution study at through silicon via (TSV) bottom by scanning white-light interference microscopy

Ahn, Jeongho, Park, Jaeyoung, Ihm, Dongchul, Lee, Byoungho, Chin, Soobok, Kang, Ho-Kyu, Noh, Jiyoung, Ko, Peter, Johnson, Timothy A., Suk, Namki, Starikov, Alexander

Year:

2012

Language:

english

File:

PDF, 814 KB

english, 2012

10

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Ellipsometric inspection of the inner surface of pellicle-covered masks

Lee, Sangyouk, Allgair, John A., Raymond, Christopher J., Song, Chulgi, Rhim, Jusang, Lee, Hyoungjoo, Kyoung, Jaisun, Chin, Soobok, Ahn, Taehyuk, An, Ilsin

Year:

2008

Language:

english

File:

PDF, 296 KB

english, 2008

11

P.171

Kim, Jungsun, kim, Miyoung, Jeoung, Seungrye, Chu, Minyoung, Lee, Soobok, Yun, Ohhyuk, Lee, Jeongrim, Choi, Kiho, Cho, Wonhyun

Journal:

Transplantation Journal

Year:

2019

Language:

english

File:

PDF, 46 KB

english, 2019